"MEMS de Piano"- an experimental course of design, fabrication, and testing of MEMS oscillator - researchr publication authors

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Yoshio Mita, Masanori Kubota, Matthieu Denoual, Eric Lebrasseur, Tomoki Sawamura. "MEMS de Piano"- an experimental course of design, fabrication, and testing of MEMS oscillator. In 10th European Workshop on Microelectronics Education (EWME), Tallinn, Estonia, May 14-16, 2014. pages 171-176, IEEE, 2014. [doi]

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