Yoshio Mita, Masanori Kubota, Matthieu Denoual, Eric Lebrasseur, Tomoki Sawamura. "MEMS de Piano"- an experimental course of design, fabrication, and testing of MEMS oscillator. In 10th European Workshop on Microelectronics Education (EWME), Tallinn, Estonia, May 14-16, 2014. pages 171-176, IEEE, 2014. [doi]