Yoshio Mita, Masanori Kubota, Matthieu Denoual, Eric Lebrasseur, Tomoki Sawamura. "MEMS de Piano"- an experimental course of design, fabrication, and testing of MEMS oscillator. In 10th European Workshop on Microelectronics Education (EWME), Tallinn, Estonia, May 14-16, 2014. pages 171-176, IEEE, 2014. [doi]
@inproceedings{MitaKDLS14,
title = {"MEMS de Piano"- an experimental course of design, fabrication, and testing of MEMS oscillator},
author = {Yoshio Mita and Masanori Kubota and Matthieu Denoual and Eric Lebrasseur and Tomoki Sawamura},
year = {2014},
doi = {10.1109/EWME.2014.6877420},
url = {https://doi.org/10.1109/EWME.2014.6877420},
researchr = {https://researchr.org/publication/MitaKDLS14},
cites = {0},
citedby = {0},
pages = {171-176},
booktitle = {10th European Workshop on Microelectronics Education (EWME), Tallinn, Estonia, May 14-16, 2014},
publisher = {IEEE},
}