Feeding of microparts along an asymmetric surface using horizontal and symmetric vibrations - Development of asymmetric surfaces using anisotropic etching process of single-crystal silicon

Atsushi Mitani, Yasutaka Matsuo. Feeding of microparts along an asymmetric surface using horizontal and symmetric vibrations - Development of asymmetric surfaces using anisotropic etching process of single-crystal silicon. In 2011 IEEE International Conference on Robotics and Biomimetics, ROBIO 2011, Karon Beach, Thailand, December 7-11, 2011. pages 795-800, IEEE, 2011. [doi]

Authors

Atsushi Mitani

This author has not been identified. Look up 'Atsushi Mitani' in Google

Yasutaka Matsuo

This author has not been identified. Look up 'Yasutaka Matsuo' in Google