Feeding of microparts along an asymmetric surface using horizontal and symmetric vibrations - Development of asymmetric surfaces using anisotropic etching process of single-crystal silicon - researchr publication

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Atsushi Mitani, Yasutaka Matsuo. Feeding of microparts along an asymmetric surface using horizontal and symmetric vibrations - Development of asymmetric surfaces using anisotropic etching process of single-crystal silicon. In 2011 IEEE International Conference on Robotics and Biomimetics, ROBIO 2011, Karon Beach, Thailand, December 7-11, 2011. pages 795-800, IEEE, 2011. [doi]

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