Feeding of microparts along an asymmetric surface using horizontal and symmetric vibrations - Development of asymmetric surfaces using anisotropic etching process of single-crystal silicon

Atsushi Mitani, Yasutaka Matsuo. Feeding of microparts along an asymmetric surface using horizontal and symmetric vibrations - Development of asymmetric surfaces using anisotropic etching process of single-crystal silicon. In 2011 IEEE International Conference on Robotics and Biomimetics, ROBIO 2011, Karon Beach, Thailand, December 7-11, 2011. pages 795-800, IEEE, 2011. [doi]

@inproceedings{MitaniM11,
  title = {Feeding of microparts along an asymmetric surface using horizontal and symmetric vibrations - Development of asymmetric surfaces using anisotropic etching process of single-crystal silicon},
  author = {Atsushi Mitani and Yasutaka Matsuo},
  year = {2011},
  doi = {10.1109/ROBIO.2011.6181384},
  url = {http://dx.doi.org/10.1109/ROBIO.2011.6181384},
  researchr = {https://researchr.org/publication/MitaniM11},
  cites = {0},
  citedby = {0},
  pages = {795-800},
  booktitle = {2011 IEEE International Conference on Robotics and Biomimetics, ROBIO 2011, Karon Beach, Thailand, December 7-11, 2011},
  publisher = {IEEE},
  isbn = {978-1-4577-2136-6},
}