CMP monitoring and prediction based metal fill - researchr publication authors

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Philippe Morey-Chaisemartin, Eric Beisser, Jean-Claude Marin, Lidwine Chaize, Pascal Guyader, Julien Rosa. CMP monitoring and prediction based metal fill. In Proceedings of the 12th International Symposium on Quality Electronic Design, ISQED 2011, Santa Clara, California, USA, 14-16 March 2011. pages 311-416, IEEE, 2011. [doi]

This author has not been identified. Look up 'Philippe Morey-Chaisemartin' in GoogleThis author has not been identified. Look up 'Eric Beisser' in GoogleThis author has not been identified. Look up 'Jean-Claude Marin' in GoogleThis author has not been identified. Look up 'Lidwine Chaize' in GoogleThis author has not been identified. Look up 'Pascal Guyader' in GoogleThis author has not been identified. Look up 'Julien Rosa' in Google

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