Philippe Morey-Chaisemartin, Eric Beisser, Jean-Claude Marin, Lidwine Chaize, Pascal Guyader, Julien Rosa. CMP monitoring and prediction based metal fill. In Proceedings of the 12th International Symposium on Quality Electronic Design, ISQED 2011, Santa Clara, California, USA, 14-16 March 2011. pages 311-416, IEEE, 2011. [doi]
@inproceedings{Morey-ChaisemartinBMCGR11,
title = {CMP monitoring and prediction based metal fill},
author = {Philippe Morey-Chaisemartin and Eric Beisser and Jean-Claude Marin and Lidwine Chaize and Pascal Guyader and Julien Rosa},
year = {2011},
doi = {10.1109/ISQED.2011.5770759},
url = {http://dx.doi.org/10.1109/ISQED.2011.5770759},
researchr = {https://researchr.org/publication/Morey-ChaisemartinBMCGR11},
cites = {0},
citedby = {0},
pages = {311-416},
booktitle = {Proceedings of the 12th International Symposium on Quality Electronic Design, ISQED 2011, Santa Clara, California, USA, 14-16 March 2011},
publisher = {IEEE},
isbn = {978-1-61284-914-0},
}