Philippe Morey-Chaisemartin, Eric Beisser, Jean-Claude Marin, Lidwine Chaize, Pascal Guyader, Julien Rosa. CMP monitoring and prediction based metal fill. In Proceedings of the 12th International Symposium on Quality Electronic Design, ISQED 2011, Santa Clara, California, USA, 14-16 March 2011. pages 311-416, IEEE, 2011. [doi]
Abstract is missing.