Intra- and inter-chip electrical interconnection formed by directed self assembly of nanocomposite containing diblock copolymer and nanometal

Mariappan Murugesan, Takafumi Fukushima, Ji Chel Bea, H. Hashimoto, Mitsu Koyanagi. Intra- and inter-chip electrical interconnection formed by directed self assembly of nanocomposite containing diblock copolymer and nanometal. In IEEE International Reliability Physics Symposium, IRPS 2018, Burlingame, CA, USA, March 11-15, 2018. pages 4, IEEE, 2018. [doi]

@inproceedings{MurugesanFBHK18,
  title = {Intra- and inter-chip electrical interconnection formed by directed self assembly of nanocomposite containing diblock copolymer and nanometal},
  author = {Mariappan Murugesan and Takafumi Fukushima and Ji Chel Bea and H. Hashimoto and Mitsu Koyanagi},
  year = {2018},
  doi = {10.1109/IRPS.2018.8353589},
  url = {https://doi.org/10.1109/IRPS.2018.8353589},
  researchr = {https://researchr.org/publication/MurugesanFBHK18},
  cites = {0},
  citedby = {0},
  pages = {4},
  booktitle = {IEEE International Reliability Physics Symposium, IRPS 2018, Burlingame, CA, USA, March 11-15, 2018},
  publisher = {IEEE},
  isbn = {978-1-5386-5479-8},
}