A New Wafer Level Latent Defect Screening Methodology for Highly Reliable DRAM Using a Response Surface Method

Junghyun Nam, Sunghoon Chun, Gibum Koo, Yanggi Kim, Byungsoo Moon, Jonghyoung Lim, Jaehoon Joo, Sangseok Kang, Hoonjung Kim, Kyeongseon Shin, Kisang Kang, Sungho Kang. A New Wafer Level Latent Defect Screening Methodology for Highly Reliable DRAM Using a Response Surface Method. In Douglas Young, Nur A. Touba, editors, 2008 IEEE International Test Conference, ITC 2008, Santa Clara, California, USA, October 26-31, 2008. pages 1-10, IEEE, 2008. [doi]

Abstract

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