Hironori Ogawa, Yukinori Kobayashi, Kougen Kageyama, Takanori Emaru, Masaki Odai. Evaluation of positioning control system using relative displacement observer for precise positioning stages. In 2016 IEEE/SICE International Symposium on System Integration, SII 2016, Sapporo, Japan, December 13-15, 2016. pages 688-693, IEEE, 2016. [doi]
Abstract is missing.