Percolation defect nucleation and growth as a description of the statistics of electrical breakdown for gate, MOL and BEOL dielectrics

Yi Ching Ong, Shou Chung Lee, A. S. Oates. Percolation defect nucleation and growth as a description of the statistics of electrical breakdown for gate, MOL and BEOL dielectrics. In IEEE International Reliability Physics Symposium, IRPS 2018, Burlingame, CA, USA, March 11-15, 2018. pages 7-1, IEEE, 2018. [doi]

@inproceedings{OngLO18,
  title = {Percolation defect nucleation and growth as a description of the statistics of electrical breakdown for gate, MOL and BEOL dielectrics},
  author = {Yi Ching Ong and Shou Chung Lee and A. S. Oates},
  year = {2018},
  doi = {10.1109/IRPS.2018.8353667},
  url = {https://doi.org/10.1109/IRPS.2018.8353667},
  researchr = {https://researchr.org/publication/OngLO18},
  cites = {0},
  citedby = {0},
  pages = {7},
  booktitle = {IEEE International Reliability Physics Symposium, IRPS 2018, Burlingame, CA, USA, March 11-15, 2018},
  publisher = {IEEE},
  isbn = {978-1-5386-5479-8},
}