Enabling 3D NAND Trench Cells for Scaled Flash Memories

S. Rachidi, S. Ramesh, L. Breuil, Z. Tao, Devin Verreck, G. L. Donadio, Antonio Arreghini, G. Van den bosch, Maarten Rosmeulen. Enabling 3D NAND Trench Cells for Scaled Flash Memories. In IEEE International Memory Workshop, IMW 2023, Monterey, CA, USA, May 21-24, 2023. pages 1-4, IEEE, 2023. [doi]

Abstract

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