Colin Rawlings, Urs Dürig, James L. Hedrick, Dan Coady, Armin Knoll. Nanometer control of the markerless overlay process using thermal scanning probe lithography. In IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014, Besancon, France, July 8-11, 2014. pages 1670-1675, IEEE, 2014. [doi]
@inproceedings{RawlingsDHCK14,
title = {Nanometer control of the markerless overlay process using thermal scanning probe lithography},
author = {Colin Rawlings and Urs Dürig and James L. Hedrick and Dan Coady and Armin Knoll},
year = {2014},
doi = {10.1109/AIM.2014.6878324},
url = {https://doi.org/10.1109/AIM.2014.6878324},
researchr = {https://researchr.org/publication/RawlingsDHCK14},
cites = {0},
citedby = {0},
pages = {1670-1675},
booktitle = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014, Besancon, France, July 8-11, 2014},
publisher = {IEEE},
}