ESD failure signature in capacitive RF MEMS switches

J. Ruan, G. J. Papaioannou, N. Nolhier, N. Mauran, M. Bafleur, Fabio Coccetti, Robert Plana. ESD failure signature in capacitive RF MEMS switches. Microelectronics Reliability, 48(8-9):1237-1240, 2008. [doi]

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