New modeling and control framework for MEMS characterization utilizing piezoresistive microcantilever sensors

Reza Saeidpourazar, Nader Jalili. New modeling and control framework for MEMS characterization utilizing piezoresistive microcantilever sensors. In American Control Conference, ACC 2008, Seattle, WA, USA, 11-13 June 2008. pages 3761-3766, IEEE, 2008. [doi]

Abstract

Abstract is missing.