Adoption of OPC and the Impact on Design and Layout

Franklin M. Schellenberg, Olivier Toublan, Luigi Capodieci, Bob Socha. Adoption of OPC and the Impact on Design and Layout. In Proceedings of the 38th Design Automation Conference, DAC 2001, Las Vegas, NV, USA, June 18-22, 2001. pages 89-92, ACM, 2001. [doi]

Abstract

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