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A Comparative Study on Front-Side, Buried and Back-Side Power Rail Topologies in 3nm Technology Node

Sandra Maria Shaji, Lingjun Zhu, Jun-Sik Yoon, Sung Kyu Lim. A Comparative Study on Front-Side, Buried and Back-Side Power Rail Topologies in 3nm Technology Node. In IEEE/ACM International Symposium on Low Power Electronics and Design, ISLPED 2023, Vienna, Austria, August 7-8, 2023. pages 1-6, IEEE, 2023. [doi]

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Sandra Maria Shaji

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Lingjun Zhu

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Jun-Sik Yoon

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Sung Kyu Lim

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