Sandra Maria Shaji, Lingjun Zhu, Jun-Sik Yoon, Sung Kyu Lim. A Comparative Study on Front-Side, Buried and Back-Side Power Rail Topologies in 3nm Technology Node. In IEEE/ACM International Symposium on Low Power Electronics and Design, ISLPED 2023, Vienna, Austria, August 7-8, 2023. pages 1-6, IEEE, 2023. [doi]
Abstract is missing.