A Comparative Study on Front-Side, Buried and Back-Side Power Rail Topologies in 3nm Technology Node

Sandra Maria Shaji, Lingjun Zhu, Jun-Sik Yoon, Sung Kyu Lim. A Comparative Study on Front-Side, Buried and Back-Side Power Rail Topologies in 3nm Technology Node. In IEEE/ACM International Symposium on Low Power Electronics and Design, ISLPED 2023, Vienna, Austria, August 7-8, 2023. pages 1-6, IEEE, 2023. [doi]

@inproceedings{ShajiZYL23,
  title = {A Comparative Study on Front-Side, Buried and Back-Side Power Rail Topologies in 3nm Technology Node},
  author = {Sandra Maria Shaji and Lingjun Zhu and Jun-Sik Yoon and Sung Kyu Lim},
  year = {2023},
  doi = {10.1109/ISLPED58423.2023.10244504},
  url = {https://doi.org/10.1109/ISLPED58423.2023.10244504},
  researchr = {https://researchr.org/publication/ShajiZYL23},
  cites = {0},
  citedby = {0},
  pages = {1-6},
  booktitle = {IEEE/ACM International Symposium on Low Power Electronics and Design, ISLPED 2023, Vienna, Austria, August 7-8, 2023},
  publisher = {IEEE},
  isbn = {979-8-3503-1175-4},
}