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Electrothermally actuated resonant rate gyroscope fabricated using the MetalMUMPs

Rana I. Shakoor, Shafaat A. Bazaz, M. Burnie, Y. Lai, M. M. Hasan. Electrothermally actuated resonant rate gyroscope fabricated using the MetalMUMPs. Microelectronics Journal, 42(4):585-593, 2011. [doi]

Authors

Rana I. Shakoor

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Shafaat A. Bazaz

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M. Burnie

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Y. Lai

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M. M. Hasan

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