Electrothermally actuated resonant rate gyroscope fabricated using the MetalMUMPs

Rana I. Shakoor, Shafaat A. Bazaz, M. Burnie, Y. Lai, M. M. Hasan. Electrothermally actuated resonant rate gyroscope fabricated using the MetalMUMPs. Microelectronics Journal, 42(4):585-593, 2011. [doi]

Possibly Related Publications

The following publications are possibly variants of this publication: