Rana I. Shakoor, Shafaat A. Bazaz, M. Burnie, Y. Lai, M. M. Hasan. Electrothermally actuated resonant rate gyroscope fabricated using the MetalMUMPs. Microelectronics Journal, 42(4):585-593, 2011. [doi]
@article{ShakoorBBLH11,
title = {Electrothermally actuated resonant rate gyroscope fabricated using the MetalMUMPs},
author = {Rana I. Shakoor and Shafaat A. Bazaz and M. Burnie and Y. Lai and M. M. Hasan},
year = {2011},
doi = {10.1016/j.mejo.2010.05.004},
url = {http://dx.doi.org/10.1016/j.mejo.2010.05.004},
researchr = {https://researchr.org/publication/ShakoorBBLH11},
cites = {0},
citedby = {0},
journal = {Microelectronics Journal},
volume = {42},
number = {4},
pages = {585-593},
}