Subarna Sinha, Jianfeng Luo, Charles Chiang. Model Based Layout Pattern Dependent Metal Filling Algorithm for Improved Chip Surface Uniformity in the Copper Process. In Proceedings of the 12th Conference on Asia South Pacific Design Automation, ASP-DAC 2007, Yokohama, Japan, January 23-26, 2007. pages 1-6, IEEE, 2007. [doi]
Abstract is missing.