Optimization of low temperature silicon nitride processes for improvement of device performance - researchr publication authors

researchr

You are not signed in
Sign in
Sign up

E. Sleeckx, Marc Schaekers, X. Shi, E. Kunnen, B. Degroote, M. Jurczak, M. de Potter de ten Broeck, E. Augendre. Optimization of low temperature silicon nitride processes for improvement of device performance. Microelectronics Reliability, 45(5-6):865-868, 2005. [doi]

This author has not been identified. Look up 'E. Sleeckx' in GoogleThis author has not been identified. Look up 'Marc Schaekers' in GoogleThis author has not been identified. Look up 'X. Shi' in GoogleThis author has not been identified. Look up 'E. Kunnen' in GoogleThis author has not been identified. Look up 'B. Degroote' in GoogleThis author has not been identified. Look up 'M. Jurczak' in GoogleThis author has not been identified. Look up 'M. de Potter de ten Broeck' in GoogleThis author has not been identified. Look up 'E. Augendre' in Google

runs on WebDSL