E. Sleeckx, Marc Schaekers, X. Shi, E. Kunnen, B. Degroote, M. Jurczak, M. de Potter de ten Broeck, E. Augendre. Optimization of low temperature silicon nitride processes for improvement of device performance. Microelectronics Reliability, 45(5-6):865-868, 2005. [doi]
No references recorded for this publication.
No citations of this publication recorded.