E. Sleeckx, Marc Schaekers, X. Shi, E. Kunnen, B. Degroote, M. Jurczak, M. de Potter de ten Broeck, E. Augendre. Optimization of low temperature silicon nitride processes for improvement of device performance. Microelectronics Reliability, 45(5-6):865-868, 2005. [doi]
No reviews for this publication, yet.