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Utilisation of FIB/SEM Technology in the Assembly of an Innovative Micro-CMM Probe

Daniel Smale, Steve Haley, Joel Segal, Ronaldo Ronaldo, Svetan M. Ratchev, Richard K. Leach, James D. Claverley. Utilisation of FIB/SEM Technology in the Assembly of an Innovative Micro-CMM Probe. In Svetan M. Ratchev, editor, Precision Assembly Technologies and Systems, 5th IFIP WG 5.5 International Precision Assembly Seminar, IPAS 2010, Chamonix, France, February 14-17, 2010. Proceedings. Volume 315 of IFIP, pages 105-112, Springer, 2010. [doi]

Authors

Daniel Smale

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Steve Haley

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Joel Segal

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Ronaldo Ronaldo

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Svetan M. Ratchev

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Richard K. Leach

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James D. Claverley

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