Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order Approach Based on Instrumental Variables - researchr publication authors

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Fazhi Song, Yang Liu 0075, Jianxin Xu 0001, Xiaofeng Yang, Qiao Zhu. Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order Approach Based on Instrumental Variables. IEEE Transactions on Industrial Electronics, 66(4):3106-3116, 2019. [doi]

This author has not been identified. Look up 'Fazhi Song' in GoogleThis author has not been identified. Look up 'Yang Liu 0075' in GoogleThis author has not been identified. Look up 'Jianxin Xu 0001' in GoogleThis author has not been identified. Look up 'Xiaofeng Yang' in GoogleThis author has not been identified. Look up 'Qiao Zhu' in Google

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