Fazhi Song, Yang Liu 0075, Jianxin Xu 0001, Xiaofeng Yang, Qiao Zhu. Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order Approach Based on Instrumental Variables. IEEE Transactions on Industrial Electronics, 66(4):3106-3116, 2019. [doi]
@article{SongLXYZ19,
title = {Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order Approach Based on Instrumental Variables},
author = {Fazhi Song and Yang Liu 0075 and Jianxin Xu 0001 and Xiaofeng Yang and Qiao Zhu},
year = {2019},
doi = {10.1109/TIE.2018.2842756},
url = {https://doi.org/10.1109/TIE.2018.2842756},
researchr = {https://researchr.org/publication/SongLXYZ19},
cites = {0},
citedby = {0},
journal = {IEEE Transactions on Industrial Electronics},
volume = {66},
number = {4},
pages = {3106-3116},
}