Crystallinity Dependence of Long-Term Reliability of Electroplated Gold Thin-Film Interconnections

Ken Suzuki, Ryota Mizuno, Yutaro Nakoshi, Hideo Miura. Crystallinity Dependence of Long-Term Reliability of Electroplated Gold Thin-Film Interconnections. In 2019 International 3D Systems Integration Conference (3DIC), Sendai, Japan, October 8-10, 2019. pages 1-5, IEEE, 2019. [doi]

Abstract

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