Structure design and optimization of SOI high-temperature pressure sensor chip

Xin Tang, Junwang Tian, Jiafeng Zhao, Zhong Jin, Yunpeng Liu, Junfu Liu, Taotao Chen, Junhui Li. Structure design and optimization of SOI high-temperature pressure sensor chip. Microelectronics Journal, 118:105245, 2021. [doi]

Authors

Xin Tang

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Junwang Tian

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Jiafeng Zhao

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Zhong Jin

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Yunpeng Liu

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Junfu Liu

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Taotao Chen

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Junhui Li

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