Xin Tang, Junwang Tian, Jiafeng Zhao, Zhong Jin, Yunpeng Liu, Junfu Liu, Taotao Chen, Junhui Li. Structure design and optimization of SOI high-temperature pressure sensor chip. Microelectronics Journal, 118:105245, 2021. [doi]
@article{TangTZJLLCL21,
title = {Structure design and optimization of SOI high-temperature pressure sensor chip},
author = {Xin Tang and Junwang Tian and Jiafeng Zhao and Zhong Jin and Yunpeng Liu and Junfu Liu and Taotao Chen and Junhui Li},
year = {2021},
doi = {10.1016/j.mejo.2021.105245},
url = {https://doi.org/10.1016/j.mejo.2021.105245},
researchr = {https://researchr.org/publication/TangTZJLLCL21},
cites = {0},
citedby = {0},
journal = {Microelectronics Journal},
volume = {118},
pages = {105245},
}