Structure design and optimization of SOI high-temperature pressure sensor chip

Xin Tang, Junwang Tian, Jiafeng Zhao, Zhong Jin, Yunpeng Liu, Junfu Liu, Taotao Chen, Junhui Li. Structure design and optimization of SOI high-temperature pressure sensor chip. Microelectronics Journal, 118:105245, 2021. [doi]

Abstract

Abstract is missing.