Modeling Litho-Constrained Design Layout

Min-Chun Tsai, Daniel Zhang, Zongwu Tang. Modeling Litho-Constrained Design Layout. In Proceedings of the 44th Design Automation Conference, DAC 2007, San Diego, CA, USA, June 4-8, 2007. pages 354-357, IEEE, 2007. [doi]

Abstract

Abstract is missing.