A dual-stage nanopositioning approach to high-speed scanning probe microscopy

Tomas Tuma, Walter Häberle, Hugo E. Rothuizen, John Lygeros, Angeliki Pantazi, Abu Sebastian. A dual-stage nanopositioning approach to high-speed scanning probe microscopy. In Proceedings of the 51th IEEE Conference on Decision and Control, CDC 2012, December 10-13, 2012, Maui, HI, USA. pages 5079-5084, IEEE, 2012. [doi]

Authors

Tomas Tuma

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Walter Häberle

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Hugo E. Rothuizen

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John Lygeros

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Angeliki Pantazi

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Abu Sebastian

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