A dual-stage nanopositioning approach to high-speed scanning probe microscopy

Tomas Tuma, Walter Häberle, Hugo E. Rothuizen, John Lygeros, Angeliki Pantazi, Abu Sebastian. A dual-stage nanopositioning approach to high-speed scanning probe microscopy. In Proceedings of the 51th IEEE Conference on Decision and Control, CDC 2012, December 10-13, 2012, Maui, HI, USA. pages 5079-5084, IEEE, 2012. [doi]

Abstract

Abstract is missing.