A dual-stage nanopositioning approach to high-speed scanning probe microscopy

Tomas Tuma, Walter Häberle, Hugo E. Rothuizen, John Lygeros, Angeliki Pantazi, Abu Sebastian. A dual-stage nanopositioning approach to high-speed scanning probe microscopy. In Proceedings of the 51th IEEE Conference on Decision and Control, CDC 2012, December 10-13, 2012, Maui, HI, USA. pages 5079-5084, IEEE, 2012. [doi]

@inproceedings{TumaHRLPS12,
  title = {A dual-stage nanopositioning approach to high-speed scanning probe microscopy},
  author = {Tomas Tuma and Walter Häberle and Hugo E. Rothuizen and John Lygeros and Angeliki Pantazi and Abu Sebastian},
  year = {2012},
  doi = {10.1109/CDC.2012.6426452},
  url = {http://dx.doi.org/10.1109/CDC.2012.6426452},
  researchr = {https://researchr.org/publication/TumaHRLPS12},
  cites = {0},
  citedby = {0},
  pages = {5079-5084},
  booktitle = {Proceedings of the 51th IEEE Conference on Decision and Control, CDC 2012, December 10-13, 2012, Maui, HI, USA},
  publisher = {IEEE},
  isbn = {978-1-4673-2065-8},
}