1.3-mu m InGaAlAs-BH laser with Cl2/N2 ECR plasma etched mesas

Hiroyuki Uchiyama, Hiroshi Sato, Kazunori Shinoda, Akira Taike, Takafumi Taniguchi, Shinji Tsuji. 1.3-mu m InGaAlAs-BH laser with Cl2/N2 ECR plasma etched mesas. IEICE Electronic Express, 1(7):193-197, 2004. [doi]

@article{UchiyamaSSTTT04,
  title = {1.3-mu m InGaAlAs-BH laser with Cl2/N2 ECR plasma etched mesas},
  author = {Hiroyuki Uchiyama and Hiroshi Sato and Kazunori Shinoda and Akira Taike and Takafumi Taniguchi and Shinji Tsuji},
  year = {2004},
  url = {http://joi.jlc.jst.go.jp/JST.JSTAGE/elex/1.193},
  researchr = {https://researchr.org/publication/UchiyamaSSTTT04},
  cites = {0},
  citedby = {0},
  journal = {IEICE Electronic Express},
  volume = {1},
  number = {7},
  pages = {193-197},
}