Lateral profiling of HCI induced damage in ultra-scaled FinFET devices with Id-Vd characteristics

Miaomiao Wang, Richard G. Southwick, Kangguo Cheng, James H. Stathis. Lateral profiling of HCI induced damage in ultra-scaled FinFET devices with Id-Vd characteristics. In IEEE International Reliability Physics Symposium, IRPS 2018, Burlingame, CA, USA, March 11-15, 2018. pages 6, IEEE, 2018. [doi]

@inproceedings{WangSCS18,
  title = {Lateral profiling of HCI induced damage in ultra-scaled FinFET devices with Id-Vd characteristics},
  author = {Miaomiao Wang and Richard G. Southwick and Kangguo Cheng and James H. Stathis},
  year = {2018},
  doi = {10.1109/IRPS.2018.8353639},
  url = {https://doi.org/10.1109/IRPS.2018.8353639},
  researchr = {https://researchr.org/publication/WangSCS18},
  cites = {0},
  citedby = {0},
  pages = {6},
  booktitle = {IEEE International Reliability Physics Symposium, IRPS 2018, Burlingame, CA, USA, March 11-15, 2018},
  publisher = {IEEE},
  isbn = {978-1-5386-5479-8},
}