Etch-back in DDSOG process by ultrasonic agitation and application to tunneling gyroscope fabrication - researchr publication authors

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Lingyun Wang, Yibo Zeng, Wenwang Li, Daoheng Sun. Etch-back in DDSOG process by ultrasonic agitation and application to tunneling gyroscope fabrication. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 156-159, IEEE, 2009. [doi]

This author has not been identified. Look up 'Lingyun Wang' in GoogleThis author has not been identified. Look up 'Yibo Zeng' in GoogleThis author has not been identified. Look up 'Wenwang Li' in GoogleThis author has not been identified. Look up 'Daoheng Sun' in Google

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