Lingyun Wang, Yibo Zeng, Wenwang Li, Daoheng Sun. Etch-back in DDSOG process by ultrasonic agitation and application to tunneling gyroscope fabrication. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 156-159, IEEE, 2009. [doi]
Abstract is missing.