Lingyun Wang, Yibo Zeng, Wenwang Li, Daoheng Sun. Etch-back in DDSOG process by ultrasonic agitation and application to tunneling gyroscope fabrication. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 156-159, IEEE, 2009. [doi]
@inproceedings{WangZLS09-0, title = {Etch-back in DDSOG process by ultrasonic agitation and application to tunneling gyroscope fabrication}, author = {Lingyun Wang and Yibo Zeng and Wenwang Li and Daoheng Sun}, year = {2009}, doi = {10.1109/NEMS.2009.5068548}, url = {http://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068548}, researchr = {https://researchr.org/publication/WangZLS09-0}, cites = {0}, citedby = {0}, pages = {156-159}, booktitle = {4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009}, publisher = {IEEE}, isbn = {978-1-4244-4629-2}, }