Robust high-gain control of nonlinear reactive sputter processes

Christian Woelfel, Peter Awakowicz, Jan Lunze. Robust high-gain control of nonlinear reactive sputter processes. In IEEE Conference on Control Technology and Applications, CCTA 2017, Mauna Lani Resort, HI, USA, August 27-30, 2017. pages 25-30, IEEE, 2017. [doi]

Authors

Christian Woelfel

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Peter Awakowicz

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Jan Lunze

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