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Christian Woelfel, Peter Awakowicz, Jan Lunze. Robust high-gain control of nonlinear reactive sputter processes. In IEEE Conference on Control Technology and Applications, CCTA 2017, Mauna Lani Resort, HI, USA, August 27-30, 2017. pages 25-30, IEEE, 2017. [doi]

The following publications are possibly variants of this publication:

Robust interval observer for substrate state estimation of nonlinear reactive sputter processesFabian Schneider, Christian Woelfel. ccta 2023: 194-200 [doi]

Model predictive control of sputter processesChristian Woelfel. amcc 2023: 4039-4043 [doi]

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