Temperature stability of electro-thermally and piezoelectrically actuated silicon carbide MEMS resonators

G. S. Wood, I. Gual, P. Parmiter, R. Cheung. Temperature stability of electro-thermally and piezoelectrically actuated silicon carbide MEMS resonators. In Microelectronics Reliability. pages 1977-1983, 2010. [doi]

Authors

G. S. Wood

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I. Gual

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P. Parmiter

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R. Cheung

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