Temperature stability of electro-thermally and piezoelectrically actuated silicon carbide MEMS resonators

G. S. Wood, I. Gual, P. Parmiter, R. Cheung. Temperature stability of electro-thermally and piezoelectrically actuated silicon carbide MEMS resonators. In Microelectronics Reliability. pages 1977-1983, 2010. [doi]

Abstract

Abstract is missing.