G. S. Wood, I. Gual, P. Parmiter, R. Cheung. Temperature stability of electro-thermally and piezoelectrically actuated silicon carbide MEMS resonators. In Microelectronics Reliability. pages 1977-1983, 2010. [doi]
@inproceedings{WoodGPC10,
title = {Temperature stability of electro-thermally and piezoelectrically actuated silicon carbide MEMS resonators},
author = {G. S. Wood and I. Gual and P. Parmiter and R. Cheung},
year = {2010},
doi = {10.1016/j.microrel.2010.05.011},
url = {http://dx.doi.org/10.1016/j.microrel.2010.05.011},
researchr = {https://researchr.org/publication/WoodGPC10},
cites = {0},
citedby = {0},
pages = {1977-1983},
booktitle = {Microelectronics Reliability},
}