Insights into metal drift induced failure in MOL and BEOL

Chen Wu, O. Varela Pedreira, Alicja Lesniewska, Yunlong Li, Ivan Ciofi, Zsolt Tokei, Kris Croes. Insights into metal drift induced failure in MOL and BEOL. In IEEE International Reliability Physics Symposium, IRPS 2018, Burlingame, CA, USA, March 11-15, 2018. pages 3, IEEE, 2018. [doi]

@inproceedings{WuPLLCTC18,
  title = {Insights into metal drift induced failure in MOL and BEOL},
  author = {Chen Wu and O. Varela Pedreira and Alicja Lesniewska and Yunlong Li and Ivan Ciofi and Zsolt Tokei and Kris Croes},
  year = {2018},
  doi = {10.1109/IRPS.2018.8353551},
  url = {https://doi.org/10.1109/IRPS.2018.8353551},
  researchr = {https://researchr.org/publication/WuPLLCTC18},
  cites = {0},
  citedby = {0},
  pages = {3},
  booktitle = {IEEE International Reliability Physics Symposium, IRPS 2018, Burlingame, CA, USA, March 11-15, 2018},
  publisher = {IEEE},
  isbn = {978-1-5386-5479-8},
}